发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To easily provide a transistor having a plurality of threshold voltages on the same substrate, by providing a region where P type impurity ions are implanted and a region where N type impurity ions are implanted on the same gate. SOLUTION: P type impurity ions are implanted in a channel 104, and on a gate electrode, an N type impurity region 108 is provided on the side of a source 102, and a P type impurity region 107 is provided on the side of a drain 103 in this order by ion implantation. The threshold value of a MOS transistor can be changed by changing the ratio of the N type impurity region 109 and the P type impurity region 107 in the channel lengthwise direction. When N type impurity ions are implanted over the entire gate electrode, the threshold voltage reduces, and when P type impurity ions are implanted, it increases. Therefore, the threshold voltage of the MOS transistor can be easily controlled, and the transistor having a plurality of threshold voltages can be easily obtained on the same substrate.
申请公布号 JPH1167928(A) 申请公布日期 1999.03.09
申请号 JP19970217601 申请日期 1997.08.12
申请人 S I I R D CENTER:KK 发明人 MORIUCHI YOSHIKAZU
分类号 H01L27/092;H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L27/092
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