| 摘要 |
PROBLEM TO BE SOLVED: To make unevenness on the surface of a solar battery substrate obtuse by roughening the surface of the solar battery substrate by sandblast and then etching the surface with a strong acid. SOLUTION: Abrasive 6 is jetted from a nozzle against an object to be worked, and the surface of a solar cell substrate 1 is made into a rough surface having unevenness. After contamination such as abrasive grains and shaved glass waste which are stuck on the surface is eliminated by washing the solar cell substrate 1, the sandblasted surface of the solar cell substrate 1 is etched by using a strong acid, and a diffuse reflectance surface 5 is formed. Unevenness in the sandblasted surface is overall made round, and the roughness is also averaged. After etching, the solar cell substrate 1 is again cleaned, and an indium oxide-tin(ITO) film 2 is formed by sputtering on the solar battery substrate 1 on which unevenness has been formed. An a-Si film 3 is formed on the film 2, and a metal electrode film 4 is further formed on the film 3. After that, the coating of a protective film or the like is performed as necessary, and a solar cell is completed. |
