| 摘要 |
<p>PURPOSE:To set a resistance value at a high value, reduce the change of the resistance value with the increase of driving power even at the time of a passivation-free state and improve even durability by specifying the composition of a heating resistor for an ink-jet head. CONSTITUTION:In a heating resistor for an ink-jet head foaming and discharging ink by heat energy generated by electric conduction, oxygen, silicon and ruthenium are used as components, and 5<=Si<=55 atomic % 5<=O<=55 atomic % and 40<=Si+O<=60 atomic % hold and 10<=Ru<=60 atomic %. holds in the composition of the heating resistor. An electrothermal converter with a heating resistor layer 3 having a specified shape and electrodes 4, 5 is formed onto a supporter, in which a lower layer 2 is shaped onto the surface of a substrate 1, and an electrode protective layer 6 covering at least the electrodes 4, 5 of the electrothermal converter is laminated.</p> |
