发明名称 PH DISTRIBUTION MEASURING DEVICE FOR ELECTROLYTE
摘要 PROBLEM TO BE SOLVED: To provide a pH distribution measuring device for electrolyte which allows clarification of electrolysis process and more accurate control of electrolysis process. SOLUTION: A sensor 9 wherein a sensor surface 13 responding to hydrogen ion is formed on the surface of a semiconductor substrate, and a light irradiation part 10 which, provided integrally with the sensor 9, emits prove light to the semiconductor substrate from the rear surface of it, are provided to a sensor part 7, while the sensor part 7 is coated with a water-proof mold resin 20 except for the sensor surface 13 so that it can be submerged in an electrolyte.
申请公布号 JPH1164227(A) 申请公布日期 1999.03.05
申请号 JP19970241826 申请日期 1997.08.21
申请人 HORIBA LTD 发明人 BAN SEIJI;NOMURA SATOSHI;TAKAMATSU SHUJI;NAKAO MOTOI
分类号 G01N21/75;G01N21/80;G01N27/416 主分类号 G01N21/75
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