| 摘要 |
<p>PROBLEM TO BE SOLVED: To analyze with high sensitivity by emitting a pulse laser beam having a wavelength asynchronously tuned with exciting level of element to be detected at different timing from that of emitting a pulse laser beam having a wavelength synchronously tuned with the exciting level of the element to be detected. SOLUTION: First, a laser 14 generates a pulse laser beam 15 having a wavelength asynchronously tuned with an exciting level of an element to be detected, and emits the beam 15 to neutral particles 13 discharged from sample 12. A pulse voltage is applied to a deflector 19 so that generated light ion 16 is not guided to a mass analyzer 17. Second, the laser 14 generates a pulse laser beam 15' having a wavelength synchronously tuned with the exciting level of the element to be detected, and emits the beam 15' to the particles 13. Generated light ion 16' is guided to the analyzer 17 without applying the pulse voltage to the deflector 19. In the case of the second laser emitting, ionization of element except the element is reduced. Accordingly, background is lowered. When light ion intensity of only the element to be detected is measured, two-dimensional distribution of the element to be detected on the surface of the sample is obtained with high sensitivity.</p> |
