| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope in which the resonance vibration of a probe driving system caused by probe scanning is promptly attenuated. SOLUTION: An arbor part 3 surrounded by a ring-shaped groove 5 is formed at the center part of a permanent magnet 2. A cap-shaped needle 4 is freely fitted to the arbor part 3, and a voice coil 6 is wound around the outer peripheral part of the needle 4. The inside of the ring-shaped groove 5 is filled with a viscous fluid 7, and the permanent magnet 2, the arbor part 3, the needle 4, and the voice coil 6 form a voice coil motor. One end of a spindle 8 is fixed to the center part of the blocked end 4a of the needle 4, and the free end of a cantilever 14 is fixed to the other end of the spindle 8. The cantilever 10b of a probe 10 is fixed to the cantilever 14 via a supporting base 12,. and a probe 10a is formed at the free end of the cantilever 10b. |
