发明名称 |
STATIC PRESSURE GUIDE DEVICE AND MOVING BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide a device that can be miniaturized and operated in wide environment including vacuum by forming a part of the surface of a moving body of a conductive material, and forming such structure that the moving body injects pressurized gas toward the opposed face of a guide body and that the guide body generates attractive force at the part of the moving body formed of conductive material. SOLUTION: An electrostatic attracting means is used as an attracting means for a pair of opposed faces of an electrostatic guide device. Electrostatic attractive force is generated by applying DC voltage between a conductive material and an electrostatic attracting function part with a dielectric layer 10 provided on an electrode 11. Conductive ceramic is used for a porous body 4 to be gas injecting holes, and repulsion and attraction can be performed in the same place by a system of applying voltage directly to the porous body 4 or a system of providing the electrostatic attracting function part on the same face as the gas injecting face. A device can therefore be miniaturized. The guide device used as a means for absorbing electrostatic force can act in a vacuum and applicable to a vacuum device. |
申请公布号 |
JPH1162965(A) |
申请公布日期 |
1999.03.05 |
申请号 |
JP19970222480 |
申请日期 |
1997.08.19 |
申请人 |
NIPPON STEEL CORP |
发明人 |
MUKAI TOSHIO;ENDO HIDEHIRO |
分类号 |
B23Q3/15;F16C32/00;F16C32/06;H01L21/68 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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