| 摘要 |
PROBLEM TO BE SOLVED: To heat radicals in plasma to moreover activate the plasma. SOLUTION: This device has a reaction vessel 21, an electrode 22 for discharge arranged in the reaction vessel 21, a heater 24 for substrate heating arranged parallel to the electrode 22 for discharge and to be mounted with a substrate 23 and infrared heaters 25 and 26 arranged in the reaction vessel 21 and irradiating glow discharge plasma generated on the space between the electrode 22 for discharge and the heater for substrate heating with infrared rays. |
