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发明名称
HOLDER SUPPORTING DEVICE IN SCANNING PROBE MICROSCOPE
摘要
申请公布号
JPH1164347(A)
申请公布日期
1999.03.05
申请号
JP19970222596
申请日期
1997.08.19
申请人
JEOL LTD
发明人
WATANABE TAKASHI
分类号
G01N1/28;G01N37/00;G01Q60/10;G01Q60/24;G01Q70/02;G01Q90/00;(IPC1-7):G01N37/00
主分类号
G01N1/28
代理机构
代理人
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