发明名称 PHOTOSENSITIVE COMPOSITION AND PRODUCTION OF RELIEF PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive compsn. showing excellent storage stability without decrease in excellent photosensitive characteristics and having high resolution and good process stability, and to provide a producing method of a relief pattern showing excellent heat resistance, adhesion property and chemical resistance. SOLUTION: This photosensitive compsn. contains (A) a compd. selected from benzoquinone compds., phenol compds., etc., (B) a dye compd. showing absorption in 450 to 600 nm region, (C) a titanocene compd. expressed by the formula (wherein R<1> to R<10> are each hydrogen atom, alkoxy group, etc.), (D) a N-aryl-α-amino acid having cyano groups, etc., and (E) a compd. having addition polymerizable groups or a polymer having addition polymerizable groups. The relief pattern is produced by irradiating a coating film of this photosensitive compsn. with active rays through a mask having a pattern and developing to remove the part not to be irradiated.
申请公布号 JPH1165114(A) 申请公布日期 1999.03.05
申请号 JP19970229531 申请日期 1997.08.26
申请人 HITACHI CHEM CO LTD 发明人 KO MASAHIKO;KOJIMA YASUNORI;KAJI MAKOTO;MIYASAKA MASAHIRO;SASAKI HAN;SEYA TAKAHIRO
分类号 G03F7/004;C08F2/50;C08F220/10;C08F299/00;G03F7/008;G03F7/027;G03F7/028;G03F7/029;G03F7/038;H01L21/027;(IPC1-7):G03F7/029 主分类号 G03F7/004
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