摘要 |
PROBLEM TO BE SOLVED: To improve the service life of a target and dispense with an X-Y driving device in a laser plasma X-ray source for generating hard X-rays of a short wavelength. SOLUTION: In a laser plasma X-ray source 1 irradiating laser beams convergently on a target to generate X-rays, a target 21 is to be a long-sized target movable at least in a lengthwise direction in order to make many times of laser irradiation possible by the movement of the unidirectional target 21, and an electric field forming means 4 is provided including an electrode forming a high electric field locally at a laser irradiation point of the target. Since the target is formed in such shape as to be able to obtain many times of laser irradiation by moving the target only in one direction, the service life of the target is improved, an an X-Y driving device is dispensed with. |