| 摘要 |
PROBLEM TO BE SOLVED: To provide a failure predicting system of a vacuum pump, capable of avoiding poor products caused by a sudden failure of a pump, improving a yield of products, and reducing the maintenance cost of the pump by warning the replacement of the pump through a process of predicting a clogging failure to be generated by products precipitated in a casing of the vacuum pump to be used in a vacuum exhaust system of a semiconductor manufacturing device. SOLUTION: In a system for predicting a clogging failure to be generated caused by products precipitated in a casing of a vacuum pump to be used in a vacuum exhaust system of a semiconductor manufacturing device, sensor units provided with AE sensors 3 for detecting AE(acoustic emission) to be generated from vacuum pumps 1, and diagnosing units 9 for analyzing and diagnosing signals from the sensor units are provided on respective vacuum pumps 1, and a display unit 10 for displaying the states of respective pumps 1 and the diagnosis results are put in connection on a LAN. |
