| 摘要 |
PROBLEM TO BE SOLVED: To prevent condensation from occurring on an evaporator even with continuous operation of cooling. SOLUTION: A temperature sensor 60 detects surface temperature of an evaporator 42, and inputs detection temperature into a temperature controller 62. The temperature controller 62 outputs a damper opening regulating signal to a damper 58 such that the surface temperature of the evaporator 42 exceeds a dew point of air in a clean room 12, and hereby controls opening and closing of the damper 58. Thus, a flow rate of waste air introduced into a duct 46 is adjusted, and temperature of mixed gas of low temperature fresh air fed to a condenser 48 and the waste gas is kept unchanged, and further the surface of the evaporator 42 is prevented from being condensed even with continuous operation of cooling. |
