| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor for detecting accurately the rotational angular velocity around a Y-axis on an X-Y 2-dimensional plane. SOLUTION: A planar vibration body 3 is constituted of a combined body, wherein a weight vibration body 5 is connected inside a rectangular frame body 6 via a connection beam 4, supported with a supporting beam 8 which is oscillatable in an X-direction. Mobile electrodes 11A and 11B are protruded at an outside end part of the frame body 6, while fixed electrodes 13A and 13B are provided on the facing side. The weight vibration body 5 is a vertical movement side electrode, with a lower part electrode 16 provided on the facing. Related to the connection beam 4, the rigidity in a Z-axis direction of the direction for detecting vibrating direction of the weight vibration body 5 is made smaller than that in the X-direction of the direction for detecting the vibration direction of the plane vibration body 3, while, relating to the supporting beam 8, the rigidity in the X-direction is made smaller than that in the Z-direction. The planar vibration body 3 is oscillated in the X-direction to cause Coriolis force in the Z-direction by rotation around a Y-axis, when only the weight vibration body 5 of the planar vibration body 3 is oscillated in the Z-direction for detecting an angular velocity about the Y-axis. |
