SYSTEM FOR CONTROLLING LIGHT INCLUDING A MICROMACHINED FOUCAULT SHUTTER ARRAY AND A METHOD OF MANUFACTURING THE SAME

摘要

An apparatus for controlling light includes a non-transparent surface (12) for blocking incident light, an array of first lenses (10) for focusing the incident light, an array of shutters (14) corresponding to the array of first lenses (10), an array of second lenses (16) corresponding to the array of shutters (14) for collimating the incident light passing through the shutters (14). The shutters (14) may be opened and closed to control the intensity of the incident light passing therethrough. Electrostatic comb drives (20) corresponding to the array of shutters (14) may be used for actuating the shutters (14), where the electrostatic comb drives (20) each include two stationary stators (24) and the shutter includes two sliders (26) that move relative to the stationary stators (24) based on a magnitude of a voltage applied thereto. Alternatively, return springs (22) may be used for biasing the shutters (14) in an opened or closed position, and micromachine actuators (20) for controlling actuation of the shutters (14).