SCANNING PROBE MICROSCOPE SYSTEM REMOVABLY ATTACHABLE TO AN OPTICAL MICROSCOPE OBJECTIVE

摘要

A scanning mechanism is provided for use in a scanning probe microscope. The scanning mechanism includes a stationary portion; a moveable portion; a plurality of springs attaching the moveable portion to the fixed portion, the plurality of springs providing tension against movement of the moveable portion relative to the stationary portion, the tension provided by the plurality of springs having a substantially linear spring constant over a scan distance; and one or more voice coils attached to either the moveable portion or the stationary portion for moving the moveable portion relative to the stationary portion in one or more orthogonal directions.