发明名称 JET PLASMA PROCESS AND APPARATUS FOR DEPOSITION OF COATINGS AND COATINGS THUS OBTAINED
摘要 <p>The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating. There is also disclosed a jet plasma apparatus for forming a coating on a substrate (75), comprising a cathode system (40), an anode system (60) and an oil delivery system (120) for providing vaporized organic material such that the organic material and the plasma (160) interact prior to, or upon contact with the substrate.</p>
申请公布号 WO1999010560(A1) 申请公布日期 1999.03.04
申请号 US1998017721 申请日期 1998.08.26
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