发明名称 Non-volatile semiconductor memory device
摘要 In a non-volatile semiconductor memory device according to the present invention, a p type source region and a p type drain region are formed in the surface of an n well. A floating gate electrode and a control gate electrode are formed on a channel region with a tunnel oxide film interposed therebetween. According to this structure, a negative potential is applied to the drain region and a positive potential is applied to the control gate electrode when data is programmed, whereby electrons are injected from the drain region to the floating gate electrode by a band-to-band tunnel current induced hot electron injection current in the drain region. As a result, a non-volatile semiconductor memory device is provided which can prevent deterioration of the tunnel oxide film and which can be miniaturized.
申请公布号 US5877524(A) 申请公布日期 1999.03.02
申请号 US19960596820 申请日期 1996.02.05
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 OONAKADO, TAKAHIRO;ONODA, HIROSHI;AJIKA, NATSUO;SAKAKIBARA, KIYOHIKO
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L29/788 主分类号 H01L21/8247
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