| 摘要 |
PROBLEM TO BE SOLVED: To provide resistance for a warp or thermal deformation of another mode while the operation is conducted in high temperature environment by performing each reciprocating operation of three superposed movable carriages by screws rotatably fixed in the axial direction. SOLUTION: A closed type ball screw mechanism associated with a linear actuator 78 reciprocates a carriage 48 in a housing, and the reciprocating force is transmitted to the separate position of a carriage 76 by a pair of elongated rods 84, 86 extended over the housing. Subsequently the carriage 76 is provided with a vertically extended member 86 formed by a frame having a pair of vertically extended members 84, 88, and the vertically extended members 86, 88 include sliding surfaces 90, 92. A carriage 94 is fitted to the sliding surfaces 90, 92 in such a manner as to freely slide. Thus, the occurrence of a deviation, a warp or the thermal deformation of the other mode can be prevented.
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