| 摘要 |
PROBLEM TO BE SOLVED: To reduce a residual stress of a tin film by interposing a boron diffused membrane between a silicon single crystal substrate and a piezoelectric membrane in an ink jet type recording head for discharging ink by pressure generated by a deflected deformation of a pressure generating membrane. SOLUTION: A layer 32 in which boron to become an electric membrane is diffused is formed on an upper surface of a silicon single crystal substrate. Then, platinum to become a lower driving electrode 10 is formed as a membrane on an upper surface of the boron diffused membrane 32. A precursor of a piezoelectric film is laminated on the electrode 10, and heated to be crystallized as a piezoelectric membrane 11. Thereafter, an upper driving electrode film 12, lower driving electrode 10 and an ink chamber such as an ink chamber or the like are formed. As a result, a static deflection amount of a pressure generating membrane at the time of applying no voltage after a pressurizing camber is formed is increased form the substrate due to that the platinum of the electrode 10 loses a restraint of a tensile stress and a compressive stress of a silicon dioxide membrane from the substrate to be largely deflected if the membrane 31 does not exist. Reversely, with this constitution, since compressive stress of the silicon of the boron diffusion is weak, it is reduced to about 10 nm. |
