| 摘要 |
PCT No. PCT/JP96/03406 Sec. 371 Date Jul. 21, 1997 Sec. 102(e) Date Jul. 21, 1997 PCT Filed Nov. 21, 1996 PCT Pub. No. WO97/19343 PCT Pub. Date May 29, 1997An analysis method by which a surface impurity in a very small region can be specified, wherein an electron beam is accelerated with an acceleration voltage and irradiated upon a very small region of a specimen and a mass spectrometry of neutral surface impurity molecules desorbed from the very small region is performed. The acceleration voltage for accelerating the electron beam is set to a voltage with which desorption of the neutral surface impurity molecules by an electron stimulated desorption (ESD) effect occurs.
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