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发明名称
CLEANING METHOD
摘要
申请公布号
JPH1157636(A)
申请公布日期
1999.03.02
申请号
JP19980129638
申请日期
1998.04.23
申请人
OMI TADAHIRO;URUTORA CLEAN TECHNOL KAIHATSU KENKYUSHO:KK
发明人
KAWADA KAZUHIKO;NAKAMORI MITSUNORI;OMI TADAHIRO;NITTA TAKEHISA
分类号
B08B3/08;B08B3/12;H01L21/304;(IPC1-7):B08B3/08
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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