Piezoelectric element which allows three-dimensional and orthogonal movement

摘要

Element characterised in that it is composed of three piezoelectric sheets which are polarised and connected in such a manner that two of them allow a lateral movement in orthogonal directions whilst the third allows a perpendicular movement, i.e. in the direction of the thickness of the sheets. On account of its characteristics, this type of piezoelectric element is especially suited for application in near-field microscopes, its essential advantage being the small size of the element and the speed and precision of its movements. <IMAGE>