WAFER-CLEANING DEVICE ON SINGLE-WAFER BASIS,申请号JP19970224339-传众专利搜索

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发明名称	WAFER-CLEANING DEVICE ON SINGLE-WAFER BASIS
摘要
申请公布号	JPH1154467(A)	申请公布日期	1999.02.26
申请号	JP19970224339	申请日期	1997.08.06
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	SANUKI YUKINOBU
分类号	B08B3/02;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B3/02
代理机构		代理人
主权项
地址

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