| 摘要 |
<p>PROBLEM TO BE SOLVED: To simply and easily manufacture an electrode structure and obtain uniform attraction acting on a wafer, by providing a plurality of positive and negative concentrically circular electrode patterns respectively and alternately, and connecting the positive concentrically circular electrode patterns together and the negative concentrically circular electrode patterns together. SOLUTION: A two-pole electrostatic chuck 10 has a jacket 11 and an insulator 12 on the jacket 11, and a pair of positive and negative concentrically circular electrodes 13, 14 are buried in the insulator 12. Thereupon, a plurality of positive and negative concentrically circular electrode patterns 17, 19 are provided respectively and alternately, and the positive concentrically circular electrode patterns 17 are connected together and the negative concentrically circular electrode patterns 19 are connected together. Thus, a plurality of positive and negative concentrically circular electrode patterns 17, 19 are provided within the insulator 12 respectively so that they have a predetermined spacing capable of obtaining stable and uniform wafer attraction in the whole wafer attracting region, and a pair of alternately arranged positive and negative concentrically circular electrodes 13, 14 provide both of the positive and negative electrodes. Therefore, the wafer can surely be attracted.</p> |
