MULTILAYER INTERCONNECTION EVALUATING STRUCTURE,申请号JP19970209294-传众专利搜索

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发明名称	MULTILAYER INTERCONNECTION EVALUATING STRUCTURE
摘要
申请公布号	JPH1154582(A)	申请公布日期	1999.02.26
申请号	JP19970209294	申请日期	1997.08.04
申请人	NEC CORP	发明人	SAITO YUMI
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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