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发明名称
METHOD OF FORMING THIN SILICON POLYCRYSTAL FILM
摘要
申请公布号
JPH1154432(A)
申请公布日期
1999.02.26
申请号
JP19970214258
申请日期
1997.08.08
申请人
SANYO SHINKU KOGYO KK
发明人
YAMADA TAKAHARU
分类号
C23C14/34;H01L21/20;H01L21/203;H01L21/336;H01L29/786;(IPC1-7):H01L21/20
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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