| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sensor accurately arranged with multiple elements and requiring no wiring by partially narrowing the wire width of a wiring pattern provided with the hot-wire type sensor elements on a flexible insulating substrate, and forming heating portions with a high resistance value. SOLUTION: This flexible flow sensor 10 is constituted of wiring sections 21, heating sections 22, and electrode pads 23. The wiring sections 21 have a large cross sectional area and are set to a low resistance value. The heating sections 22 are made of the same material as that of the wiring sections 21, the wire width is narrowed to reduce the cross sectional area, and they are set to a high resistance value. The wiring sections 21 may be formed into heating resistors with a material having high resistivity. Protective layers are formed by the coating of a polyimide resin at least on the surfaces of the wiring sections 21 and the heating sections 22 of the flow sensor 10. The deterioration of the elements is reduced, and the flow sensor 10 can be easily carried or stored.</p> |
