| 摘要 |
PROBLEM TO BE SOLVED: To comply with a request for processing based upon a different recipe on the same manufacturing device by allowing the manufacturing device to automatically determine a recipe for a body to be processed by referring to the ID number and process number of a process flow. SOLUTION: When a lot is fed to the manufacturing device, an ID reader/ writer device 3 of the manufacturing device reads the process flow ID number and process number recorded on the ID carrier that the lot holds. The read process flow ID number and process number are retrieved from a process recipe correspondence table 4 that the manufacturing device has. When the retrieved contents are registered in the process recipe correspondence table 4, the lot is processed according to the registered recipe. After the processing, the ID reader/writer device 3 of the manufacturing device rewrites the process number recorded in the ID carrier that the lot holds into the next process number registered in the process recipe correspondence table 4. |
