| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element and manufacturing method thereof in which the occurrence of cracks and fractures is hardly generated. SOLUTION: An electrode 22 is formed on the entire principal surface on one side of a piezoelectric base plate 21 that is strip-shaped and has a uniform thickness, and on the principal surface on the other side of the piezoelectric base plate 21, two-divided electrode 24, 25 are symmetrically formed in its longitudinal direction through a slit 23. In the principal surface on the other side of the piezoelectric base plate 21 constituting a piezoelectric element, a groove is not formed in the part corresponding to the slit between two electrodes, so that the stress concentration to the part where the slit of the piezoelectric base plate is formed can be reduced, and the occurrence of cracks and fractures of the piezoelectric base plate can be prevented. Further, since the thickness of the piezoelectric base plate can be uniformly formed, the dispersion in the deflection can be reduced, and in the case where it is used for an acceleration sensor or the like, the increase in the measuring error can be prevented. |
