INFRARED DEVICE AND GAS DETECTOR USING IT

摘要

PROBLEM TO BE SOLVED: To provide a small infrared device which is composed of an infrared light source and of an infrared detector. SOLUTION: An infrared light source 1 in which a filament 12 is formed on a semiconductor substrate 11 and which forms a diaphragm structure or a microbridge structure and an infrared detector 2 in which a diaphragm structure or a microbridge structure is formed of a semiconductor substrate 21 and of a support membrane 22 and in which infrared detection parts 23 to 26 are formed on the support membrane 22 are mounted inside an identical package 3.