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发明名称
TFT ARRAY SUBSTRATE AND ITS PRODUCTION, AND TFT LIQUID CRYSTAL DISPLAY DEVICE
摘要
申请公布号
JPH1152425(A)
申请公布日期
1999.02.26
申请号
JP19970213487
申请日期
1997.08.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAMOTO AKIRA
分类号
G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):G02F1/136;G02F1/134
主分类号
G02F1/1343
代理机构
代理人
主权项
地址
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