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发明名称
IC-TESTING APPARATUS AND METHOD FOR PARALLEL MEASUREMENT AT IC-TESTING APPARATUS
摘要
申请公布号
JPH1152016(A)
申请公布日期
1999.02.26
申请号
JP19970206249
申请日期
1997.07.31
申请人
ANDO ELECTRIC CO LTD
发明人
KYODA OSAMU
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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