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发明名称
CRACK DETECTING METHOD AND CRACK DETECTOR
摘要
申请公布号
JPH1151913(A)
申请公布日期
1999.02.26
申请号
JP19970214256
申请日期
1997.08.08
申请人
NIKON CORP
发明人
SAKUMA SHIGERU;SHIOZAWA MASAKI
分类号
G01N29/14;G01H17/00;(IPC1-7):G01N29/14
主分类号
G01N29/14
代理机构
代理人
主权项
地址
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