| 摘要 |
PROBLEM TO BE SOLVED: To detect acceleration in multiple axial directions by holding a mass body with a beam displaceable in multiple directions, and detecting displacements in multiple directions of the mass body due to acceleration with an electrostatic capacity. SOLUTION: When acceleration is applied in the in-plane x-axis direction, a mass body a12 is displaced in the x-axis direction, and the electrostatic capacity of a capacitor is changed. A mass body b13 has high rigidity in the x-axis direction and is not displaced against the acceleration in the x-axis direction. When acceleration is applied in the y-axis direction, the mass body b13 is displaced in the y-axis direction, and the electrostatic capacity of the capacitor is changed. These electrostatic capacity changes are converted into voltage outputs through a signal processing circuit, and two-axis acceleration in the in-plane directions (X, Y) can be detected. When acceleration in the z-direction is applied to the mass body a12 and the mass body b13, the mass bodies a12, b13 are displaced, and the electrostatic capacity of the capacitor is changed. This electrostatic capacity change is converted into a voltage output through the signal processing circuit, and the acceleration in the out-of-plane (z-axis) direction can be detected. |
