PRODUCTION OF OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To make it possible to easy control refractive index anisotropy even after completion of an optical device by controlling the refractive index anisotropy of a thermal refractive index anisotropy variable material by a heat treatment. SOLUTION: An under-clad 2 of polyimide having an isotropic refractive index is manufactured on a substrate 1 and the thermal refractive index anisotropy variable material having the refractive index slightly larger than the refractive index of the under-clad 2 in the refractive index after formation of the film is deposited as a core 3 on the under-clad 2. A channel waveguide is thereafter manufactured by a reactive ion etching method. After the hatching part is manufactured of the thermal refractive index anisotropy variable material, an over-side clad 4 playing the function of an over-clad and a side clad is manufactured by a silicon resin having the same isotropic refractive index as the isotropic refractive index of the under-clad 2. At this time, the device or device constituting element is subjected to the heat treatment of a prescribed temp. or above, by which the refractive index anisotropy of the thermal refractive index anisotropy variable material is controlled.