| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor evaluation unit which can analyze the impurity distribution in a sample or the surface profile of the sample accurately. SOLUTION: The semiconductor evaluation unit comprises a SCM measuring unit 1, and a control section 2. The control section 2 calibrates the initially inputted profile data at the forward end of a probe based on the SCM measurement of a reference sample and the simulation results thereof, performs an SCM measurement of a sample to be measured and estimates the impurity distribution based on the measurements. The CV characteristics of the sample to be measured are then operated based on the estimated impurity distribution. Subsequently, the impurity distribution is corrected such that the CV characteristics measured by the match the operated CV characteristics thus operating the CV characteristics again. The final impurity distribution when both CV characteristics match each other is outputted to a display or a printer. According to the arrangement, the impurity distribution can be analyzed with an accuracy finer than the dimensions at the forward end of the probe. |
