| 摘要 |
PROBLEM TO BE SOLVED: To maintain such a high degree of vacuum that the effect of the viscosity of the air on the Qm of a vibrator becomes smaller with accuracy for a long period in a package structure for vibration type detector which is in an area where the Qm of the vibrator is determined in rate by the viscosity of the air. SOLUTION: A vibrator 1 is housed in an internal vacuum chamber 2 held between a substrate 5 and a glass package 3 and fixed to the substrate 5. The connecting section between the package 3 and substrate 5 is airtightly sealed by soldering, welding, anode connection, etc., and inside of the chamber 2 is maintained at a high vacuum. The vibrator 1, glass package 3, and substrate 5 are housed in an external vacuum chamber 6 held between a base 7 and a cap 8 and the substrate 5 is fixed to the base 7. The cap 8 is airtightly fixed to the base 7 by welding, etc., at welds 9 and the external vacuum chamber 6 is maintained at a high vacuum. |
