ELECTRON BEAM REDUCTION AND TRANSFER DEVICE,申请号JP19970218342-传众专利搜索

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发明名称	ELECTRON BEAM REDUCTION AND TRANSFER DEVICE
摘要
申请公布号	JPH1154412(A)	申请公布日期	1999.02.26
申请号	JP19970218342	申请日期	1997.07.30
申请人	NIKON CORP	发明人	NAKASUJI MAMORU
分类号	G03F7/20;H01J37/141;H01J37/21;H01J37/30;H01J37/302;H01J37/305;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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