METHOD AND EQUIPMENT FOR INSPECTION USING ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To provide high speed method and equipment for inspection using electron beam. SOLUTION: An electron beam 36 from an electron gun 1 is focused through an objective lens 9 and decelerated by a retarding voltage being applied to a sample 13 which is scanned with an electron beam while moving. Secondary electrons 33 emitted from the sample 13 are accelerated by the retarding voltage to produce a substantially parallel beam which is then deflected by an E×B deflector 18 interposed between the objective lens 9 and the sample 13. A secondary electron generating body 19 is irradiated with the deflected beam to emit secondary electrons 20 which are detected by a charged particle detector 21. The detection signal is stored in the form of an image signal and process at an operating section 29 before a decision is made whether a defect is present at a decision section 30 through comparison.