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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JPS5183772(A)
申请公布日期
1976.07.22
申请号
JP19750008936
申请日期
1975.01.20
申请人
MATSUSHITA ELECTRONICS CORP
发明人
ITO KUNIO;INOE MORIO
分类号
C30B31/06;H01L21/22;H01L21/265;H01L33/30;H01L33/40
主分类号
C30B31/06
代理机构
代理人
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