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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH1154612(A)
申请公布日期
1999.02.26
申请号
JP19970204819
申请日期
1997.07.30
申请人
SONY CORP
发明人
KOYAMA KAZUHIDE;AOYAMA JUNICHI
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
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