发明名称 HOLDER FOR FILM FORMING OF SEMICONDUCTOR BAR
摘要 <p>PROBLEM TO BE SOLVED: To securely form a film on a section of the semiconductor bar held stacked independently of presence of burrs. SOLUTION: About sides 506 and 507 of an internal space 502, as the part of a predetermined distance D from the sides 504 and 505 of the internal space are exposed except the end face restriction materials 514 and 515, and side face restriction materials 516, 517, 526, and 527, a plurality of semiconductor bars having a semiconductor bar 5a with burrs 5c can be held stacked. The semiconductor bar 5a with burrs 5c can be held as the burrs 5c pass the exposed area of the side 506 and 507 of the internal space 502. As the all semiconductor bars can be held, the semiconductor bar 5a with burrs 5c can also be utilized without wasting over.</p>
申请公布号 JPH1154597(A) 申请公布日期 1999.02.26
申请号 JP19970210950 申请日期 1997.08.05
申请人 SHARP CORP 发明人 OSHIMA NOBORU
分类号 H01L21/683;H01L21/68;H01S5/00;(IPC1-7):H01L21/68;H01S3/18 主分类号 H01L21/683
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