发明名称 ARTICLE IDENTIFICATION SYSTEM
摘要 PROBLEM TO BE SOLVED: To suppress the floor area to b occupied, the tact time and the price. SOLUTION: A wafer position detector 50 for detecting the center of a wafer 1 is disposed on one side of the delivery unit 21 of a wafer identification system 20. The delivery unit 21 is constructed to match the position of the wafer 1 provided with an identification code 4 with the reading area 47 in the reading stage 35 of a reader 40. In reading, the wafer 1 to be identified is delivered to the wafer position detector 50 by means of the delivery unit 21 and the center thereof is detected. Upon receiving the wafer, the delivery unit 21 is matched with the position of the identification code 4 on the wafer with the reading area 47 of the reader 40 on the reading stage 35. The detected data is used by the wafer position detector 50. When the identification code 4 is matched with the reading area 47, the reader 40 reads out the identification code 4.
申请公布号 JPH1154585(A) 申请公布日期 1999.02.26
申请号 JP19970220678 申请日期 1997.08.01
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 NAGAI HARUO;YAMATANI KAZUHIRO;NAKAMURA SEIGO;MEGURO YASUYUKI;NODA HAJIME
分类号 H01L21/677;H01L21/02;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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