| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for inspecting LCD panels whereby an optimum image to extract a defect can be obtained at a dark-side defect inspection and a bright-side defect inspection. SOLUTION: This apparatus includes a first image pickup device 11 for inspection of dark-side defects, a second image pickup device 12 for inspection of bright-side defects, a first inspection process means for inspecting dark-side defects on the basis of images picked up by the first image pickup means 11, and a second inspection process means for inspecting bright-side defects on the basis of images picked up by the second image pickup means 12. The first image pickup device 11 is inclined by a visual angleθ1 to a direction of a normal of an LCD panel 1 whereby a contrast of the dark-side defect becomes maximum. The second image pickup device 12 is inclined by a visual angleθ2 to the direction of the normal of the LCD panel 1 whereby a contrast of the bright-side defect becomes maximum.
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