Measurement probe contacting device for semiconductor laser testing

摘要

The device allows electrical contacting of a movable mounted measurement probe (1) on a contact surface (5) of a measurement object (6). The device includes a support device (3) which carries the probe (1). An actuator (4) is associated with the probe (1) or its support device (3), for positioning the measurement probe (1). In a first operating position (B) the probe directly touches the contact surface but exerts no force on it. In the second position (C) the probe exerts a first small force parallel to the contact surface. The support device has an elastic element (3) in the form of a leaf spring (16) such that on transition from the first to the second operating position, the effective direction of the torque exerted on the probe is reversed.