Installation for coating plate shaped substrates with thin layers by cathode sputtering

摘要

The suction spaces (19, 19',...; 20, 20',...) respectively at the end of each compartment (C, C',...) and at the beginning of its adjoining compartment (C, C',...) always have an opening (7, 7a,...) for connection to the suction branch (18, 18a,...) of a vacuum pump (8, 8',...; 8a, 8a',...). The adjacent openings (7, 7a,...) are offset relative to one another in a direction perpendicular to the longitudinal direction (A) of the installation.