发明名称 Multiple axis acceleration sensor
摘要 The sensor has at least one weight (12,13) containing a single crystal silicon wafer, and at least two parallel cantilever beams (3) which hold the weight so that its vibration forms are defined so that it moves parallel to the wafer plane. Accelerations along the various directions are detected by at least one fixed, insulated electrode (14). A displacement detector applies a constant voltage between the electrode and weight to detect weight displacements.
申请公布号 DE19810534(A1) 申请公布日期 1999.02.25
申请号 DE1998110534 申请日期 1998.03.11
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 HIRATA, YOSHIAKI, TOKIO/TOKYO, JP;TSUGAI, MASAHIRO, TOKIO/TOKYO, JP;KONNO, NOBUAKI, TOKIO/TOKYO, JP
分类号 G01L5/16;G01P15/08;G01P15/125;G01P15/18;H01L29/84 主分类号 G01L5/16
代理机构 代理人
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