OBJECT OBSERVATION DEVICE AND OBJECT OBSERVATION METHOD

摘要

An object observation device including a derivable sample stage (26), an electron beam projection optical system, an electron detector (36) onto which a secondary beam of secondary electrons emitted from a sample, reflected electrons or back scattering electrons are projected to generate image information, and a deflector (35) which deflects the secondary beam, characterized in that the electron detector has a converter which converts the secondary beam into light, an array image pickup unit which transfers the charges of the pixels of a plurality of lines successively at predetermined timings to the corresponding pixels of adjacent lines and outputs charges summed up to a line corresponding to the end successively, and a control unit which outputs transfer signals, and the control unit controls the array image pickup unit in accordance with the variation of the position at which the secondary beam is projected with a stage scanning mode and a deflector scanning mode. An object observation method is also disclosed.