| 摘要 |
The invention concerns a micro pump (10; 100) comprising at least a first plate (12), and a second plate (20), an intermediate plate (18), a pumping chamber (24) and inlet and outlet control members (28, 30). The invention is characterised in that said inlet control member (28) is a non-return valve located on the greater part of said intermediate plate (18) thickness, consisting of a mobile member (40) and a part in the form of a membrane (42) located in the proximity of one of the plates (12, 20), linking said mobile member (40) to said intermediate plate (18) remainder and enabling, by its elasticity, the movement of said valve (28) between a closed position and an open position, said mobile member (40) being traversed by an orifice of limited volume.
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